Scanning Electron Microscopes

Hitachi SU8010 Cold Field Emission SEM Location: Room 181, IPST Bldg

  • Please contact Tim Zhang for training
  •  1.0  nm resolution( Secondary electron detector) at 15 kV and 1.3 nm at 1 kV
  • 2.0nm resolution(Backscattered electron detector) at 15KV
  • Operating voltage range 100 V – 30 kV
  • High resolution image grabber up to 5120X3840 pixels.
  • Ultra-clean vacuum system with a turbo pump and an oil free dry-scroll pump.
  • A stationary anti-contamination trap reduce the re-deposition of hydrocarbons onto the sample surface
  • Operating Instructions

LEO 1530 thermally-assisted field emission (TFE) scanning electron microscope (SEM)

Location: room 176, IPST Bldg.

  • State-of-the-art; 1 nm resolution at 20 kV and 3 nm at 1 kV operating voltage range 200 V – 30 kV
  • large specimen chamber and eucentric stage
    thin window SSD energy dispersive spectrometer (EDS), for microanalysis of elements down to Boron.
  •  Operating Instructions